TS200-THZ

TS150-AIT and TS200-THZ probe systems expand MPI one-of-a-kind system solutions for emerging THz applications such as high-speed 5G communication, satellites, non-invasive spectroscopy, security and surveillance, medical and health care equipment, and short range automotive radar by adding active impedance tuner integrations on the same probe stations. These two systems are the industry’s first explicitly designed 150 mm and 200 mm probe systems providing accurate tests for the combination of requirements for mm-wave, THz, and automated impedance tuner applications with best possible measurement directivity.

Features:

• Seamless integration of any banded, differential or broadband frequency extenders up to 1.5 THz and/or automated impedance tuners
• Novel design of extenders/tuners integration for maximum of measurement dynamic
• Maximum on mechanical stability and repeatability combined with convenient and safety operation

Air-Bearing Stage:

The MPI unique air-bearing stage design, with simple single-handed puck control, provides unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25×25 mm XY-Theta micrometer movement.

Unique Platen Lift with Probe Hover Control:

The highly repeatable (1 µm) platen lift design with three discrete positions for contact, separation (300 µm), and loading (3 mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS200-THZ manual probe system. These features prevent unexpected probe or wafer damage while providing intuitive control, accurate contact positioning, and safety set-up. This capability is especially critical if probes in mmW and sub-THz range are so cost intensive. Additional Probe Hover Control comes with hover heights (50, 100 or 150 µm) for easy and convenient probe to pad alignment.